BiblioVault - Books by Anc, Maria J.

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1 books by Anc, Maria J.

SIMOX
Maria J. Anc
The Institution of Engineering and Technology, 2004
Library of Congress TK7871.85.S5554 2004 | Dewey Decimal 621.31937

SIMOX explores Separation-by-IMplanted-OXygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing.

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